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General requirements for clean room operation

2016-09-05 16:15:18
Article Source: Shenzhen Yong-clean Engineering Co., Ltd. Author: Admin Views: 833
General rules for clean room operation:

1. When handling the chip, you must wear fiber-free gloves and hold the chip with clean and clean tweezers. Do not touch the chip with your fingers or anything else. The chip that has been contaminated by contact must be cleaned before it can continue to be used:

(1) If the front end of any tweezers (that is, the chip holding end) is touched, or the tweezers are dropped on the ground, they must be cleaned. Do not wipe the dirty tweezers with a paper towel or cloth.

(2) After the chip is cleaned and before the next procedure, if it is touched by a finger, it must be cleaned again.

(3) When placing the chip on a quartz boat and preparing to enter the furnace tube, if the tweezers used are found to be contaminated or the chip is conspicuously caused by tweezers, the chip must be cleaned again and replaced with clean tweezers. .

2. The chip must be placed in a box, covered and stored in a specified position, and as far as possible, it should not be exposed.

3. Avoid talking on the chip to prevent saliva from splashing on the chip. Before the chip enters the diffusion furnace, please pay special attention to prevent the above actions. If the chip is stained with fiber debris, spray it with a nitrogen gun.

4. From the Teflon crystal boat, QuartzBoat and other carriers (Carrier), when removing the chip, you must lift it up vertically to avoid scratching the chip. The microscope lens must be separated from the chip. Remove the chip from the mount.

5. If the oxide layer has been grown on the chip, do not use a diamond knife to write on the chip before sending it to the yellow light chamber.

6. During operation, whether or not wearing gloves, hands must not be put into the washing sink.

7. When using a chemical station or oven to process chips, be sure to place the chip in a Teflon crystal boat. Do not use plastic boxes.

8. When placing the chip in the quartz boat, if the chip falls on the ground or in the hand, the chip must be cleaned again before entering the oxidation furnace.

9. Do not touch the inside of the chip box. If it is touched or contaminated by broken chips, it must be cleaned again.

10. Gloves, waste paper and other miscellaneous things should not be left on the operating table. Gloves must be replaced with new ones if they are burnt, frayed or have more fiber.

11.Unless instructed, never open unfamiliar instruments and various on-off valve control knobs or handles.

12. Please inform the relevant personnel about strange taste or abnormal reaction solution, color, sound, etc.

13. If there is any damage to the instrument due to incorrect operation, please inform the responsible person or teacher immediately.

14. The chip box must be kept clean in and out of the clean room, and sealed with plastic wrap. Offenders must not enter.

15. All ball-point pens and dust-free notebooks are used for records in clean rooms. General paper and pencils must not be carried in.

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